JPH0515660Y2 - - Google Patents

Info

Publication number
JPH0515660Y2
JPH0515660Y2 JP1988105963U JP10596388U JPH0515660Y2 JP H0515660 Y2 JPH0515660 Y2 JP H0515660Y2 JP 1988105963 U JP1988105963 U JP 1988105963U JP 10596388 U JP10596388 U JP 10596388U JP H0515660 Y2 JPH0515660 Y2 JP H0515660Y2
Authority
JP
Japan
Prior art keywords
diaphragm
valve
curved surface
valve seat
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988105963U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229361U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988105963U priority Critical patent/JPH0515660Y2/ja
Publication of JPH0229361U publication Critical patent/JPH0229361U/ja
Application granted granted Critical
Publication of JPH0515660Y2 publication Critical patent/JPH0515660Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
JP1988105963U 1988-08-12 1988-08-12 Expired - Lifetime JPH0515660Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988105963U JPH0515660Y2 (en]) 1988-08-12 1988-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988105963U JPH0515660Y2 (en]) 1988-08-12 1988-08-12

Publications (2)

Publication Number Publication Date
JPH0229361U JPH0229361U (en]) 1990-02-26
JPH0515660Y2 true JPH0515660Y2 (en]) 1993-04-23

Family

ID=31339049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988105963U Expired - Lifetime JPH0515660Y2 (en]) 1988-08-12 1988-08-12

Country Status (1)

Country Link
JP (1) JPH0515660Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2547590Y2 (ja) * 1993-11-12 1997-09-10 大野ベロー工業株式会社 ダイヤフラム弁
JP3586075B2 (ja) * 1997-08-15 2004-11-10 忠弘 大見 圧力式流量制御装置
JP6564593B2 (ja) 2015-03-25 2019-08-21 株式会社フジキン ダイヤフラム弁
US11402029B2 (en) * 2018-04-06 2022-08-02 Fujikin Incorporated Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0234532Y2 (en]) * 1985-12-04 1990-09-17

Also Published As

Publication number Publication date
JPH0229361U (en]) 1990-02-26

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